Invention Grant
- Patent Title: MEMS gyroscope with improved rejection of a quadrature error
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Application No.: US15956446Application Date: 2018-04-18
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Publication No.: US10775171B2Publication Date: 2020-09-15
- Inventor: Gabriele Gattere , Luca Guerinoni , Luca Giuseppe Falorni , Damiano Milani , Francesco Braghin , Ferruccio Resta , Mohammad Izadi
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2e516d53
- Main IPC: G01C19/5712
- IPC: G01C19/5712 ; G01C19/574 ; G01C19/5755

Abstract:
A MEMS gyroscope is equipped with: at least a first mobile mass suspended from the top of a substrate by means of elastic suspension elements coupled to anchor points rigidly fixed to the substrate, in such a manner as to be actuated in an actuating movement along a first axis of a horizontal plane and to carry out a measurement movement along a vertical axis, transverse to the horizontal plane, in response to a first angular velocity acting about a second axis of the horizontal plane, transverse to the first axis. The elastic suspension elements are configured in such a manner as to internally compensate unwanted displacements out of the horizontal plane along the vertical axis originating from the actuating movement, such that the mobile mass remains in the horizontal plane during the actuating movement.
Public/Granted literature
- US20180306580A1 MEMS GYROSCOPE WITH IMPROVED REJECTION OF A QUADRATURE ERROR Public/Granted day:2018-10-25
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