Invention Grant
- Patent Title: Semiconductor devices and semiconductor devices including a redistribution layer
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Application No.: US16387771Application Date: 2019-04-18
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Publication No.: US10777523B2Publication Date: 2020-09-15
- Inventor: Anilkumar Chandolu , Kenneth N. Hagen
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40 ; H01L23/00 ; H01L21/66 ; H01L25/065 ; H01L25/00

Abstract:
A method of forming a conductive material on a semiconductor device. The method comprises removing at least a portion of a conductive pad within an aperture in a dielectric material over a substrate. The method further comprises forming a seed material at least within a bottom of the aperture and over the dielectric material, forming a protective material over the seed material within the aperture, and forming a conductive pillar in contact with the seed material through an opening in the protective material over surfaces of the seed material within the aperture. A method of forming an electrical connection between adjacent semiconductor devices, and a semiconductor device, are also described.
Public/Granted literature
- US20190252338A1 SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEVICES INCLUDING A REDISTRIBUTION LAYER Public/Granted day:2019-08-15
Information query
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