Invention Grant
- Patent Title: Method of fabricating thin film transistor, thin film transistor, array substrate, and display apparatus
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Application No.: US16341012Application Date: 2018-08-13
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Publication No.: US10777588B2Publication Date: 2020-09-15
- Inventor: Hu Meng , Xuelei Liang , Jiye Xia , Boyuan Tian , Guodong Dong , Qi Huang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , PEKING UNIVERSITY
- Applicant Address: CN Beijing CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,PEKING UNIVERSITY
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,PEKING UNIVERSITY
- Current Assignee Address: CN Beijing CN Beijing
- Agency: Intellectual Valley Law, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@327cbc16
- International Application: PCT/CN2018/100236 WO 20180813
- International Announcement: WO2019/042118 WO 20190307
- Main IPC: H01L27/12
- IPC: H01L27/12 ; C01B32/168 ; C01F17/218 ; C01F7/42 ; H01L21/02 ; H01L21/66

Abstract:
The present application provides a method of fabricating a thin film transistor. The method includes selecting a nano-structure material having a monotonic relationship between a threshold voltage and a channel length when the nano-structure material is formed as a channel part in a thin film transistor; forming an active layer using the nano-structure material; determining a nominal channel length of a channel part of the thin film transistor based on the monotonic relationship and a reference threshold voltage so that the thin film transistor is formed to have a nominal threshold voltage; and forming a source electrode and a drain electrode thereby forming the channel part in the active layer having the nominal channel length.
Public/Granted literature
- US20200185422A1 METHOD OF FABRICATING THIN FILM TRANSISTOR, THIN FILM TRANSISTOR, ARRAY SUBSTRATE, AND DISPLAY APPARATUS Public/Granted day:2020-06-11
Information query
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