Invention Grant
- Patent Title: Removal of work function metal wing to improve device yield in vertical FETs
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Application No.: US16255391Application Date: 2019-01-23
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Publication No.: US10777679B2Publication Date: 2020-09-15
- Inventor: Choonghyun Lee , Soon-Cheon Seo , Injo Ok , Alexander Reznicek
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent L. Jeffrey Kelly, Esq.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/423

Abstract:
A vertical transistor that includes a gate structure containing a work function metal liner that is wing-free is provided. The wing-free work function metal liner is provided by recessing a sacrificial material layer portion that is located adjacent to a work function metal liner having a winged surface near the channel and fin ends. The recessed sacrificial material layer portion allows for multi-directional etching of the winged surface of the work function metal liner and thus the wing surface can be removed forming a wing-free work function metal liner. The vertical transistor of the present application has reduced parasitic capacitance and a reduced tendency of electrical shorting between a top source/drain structure and the gate structure. The method of the present application can improve device yield.
Public/Granted literature
- US20200235238A1 REMOVAL OF WORK FUNCTION METAL WING TO IMPROVE DEVICE YIELD IN VERTICAL FETS Public/Granted day:2020-07-23
Information query
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