Invention Grant
- Patent Title: Fabrication of a quantum device
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Application No.: US16252230Application Date: 2019-01-18
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Publication No.: US10777728B2Publication Date: 2020-09-15
- Inventor: Pavel Aseev , Philippe Caroff-Gaonac'h
- Applicant: Microsoft Technology Licensing, LLC
- Applicant Address: US WA Redmond
- Assignee: Microsoft Technology Licensing, LLC
- Current Assignee: Microsoft Technology Licensing, LLC
- Current Assignee Address: US WA Redmond
- Agency: Klarquist Sparkman, LLP
- Main IPC: H01L39/24
- IPC: H01L39/24 ; H01L39/22 ; H01L39/12 ; G06N10/00

Abstract:
In a masking phase, a first segment of an amorphous mask is formed on an underlying layer of a substrate. The first segment comprises a first set of trenches exposing the underlying layer. In the masking phase, a second segment of the amorphous mask is formed on the underlying layer. The second segment comprises a second set of trenches exposing the underlying layer. The segments are non-overlapping. An open end of one of the first set of trenches faces an open end of one of the second set of trenches, but the ends are separated by a portion of the amorphous mask. In a semiconductor growth phase, semiconductor material is grown, by selective area growth, in the first and second sets of trenches to form first and second sub-networks of nanowires on the underlying layer. The first and second sub-networks of nanowires are joined to form a single nanowire network.
Public/Granted literature
- US20200235276A1 FABRICATION OF A QUANTUM DEVICE Public/Granted day:2020-07-23
Information query
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