Invention Grant
- Patent Title: Passivation film deposition method for light-emitting diode
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Application No.: US16124475Application Date: 2018-09-07
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Publication No.: US10777777B2Publication Date: 2020-09-15
- Inventor: Hong-Jae Lee , Jong-Hwan Kim , Woo-Pil Shim , Woo-Jin Lee , Sung-Yean Yoon , Don-Hee Lee
- Applicant: TES CO., LTD
- Applicant Address: KR Yongin, Gyeonggi-do
- Assignee: TES CO., LTD
- Current Assignee: TES CO., LTD
- Current Assignee Address: KR Yongin, Gyeonggi-do
- Agency: Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.
- Agent Steven M. Jensen; Joohee Lee
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@521fb6f
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L51/56 ; H01L51/52

Abstract:
The present invention relates to a passivation film deposition method for a light-emitting diode, comprising the steps of: depositing, on an upper part of a light-emitting diode of a substrate, a first passivation film having a silicon nitride (SiNx); and depositing, on an upper part of the first passivation film, a second passivation film having a silicon oxide (SiOx), wherein the ratio of the thickness of the first passivation film to the thickness of the second passivation film is 0.2-0.4:1.
Public/Granted literature
- US20190019996A1 Passivation Film Deposition Method For Light-Emitting Diode Public/Granted day:2019-01-17
Information query
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