- Patent Title: Bulk acoustic wave resonator with a modified outside stack portion
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Application No.: US15375846Application Date: 2016-12-12
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Publication No.: US10778180B2Publication Date: 2020-09-15
- Inventor: Alireza Tajic , Paul Stokes , Ralph Rothemund , Gernot Fattinger
- Applicant: Qorvo US, Inc.
- Applicant Address: US NC Greensboro
- Assignee: Qorvo US, Inc.
- Current Assignee: Qorvo US, Inc.
- Current Assignee Address: US NC Greensboro
- Agency: Withrow & Terranova, P.L.L.C.
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/17 ; B06B1/06 ; H03H3/02

Abstract:
Bulk Acoustic Wave (BAW) resonators that include a modified outside stack portion and methods for fabricating such BAW resonators are provided. One BAW resonator includes a reflector, a bottom electrode, a piezoelectric layer, and a top electrode. An active region is formed where the top electrode overlaps the bottom electrode and an outside region surrounds the active region. The piezoelectric layer includes a top surface adjacent to the top electrode and a bottom surface adjacent to the bottom electrode. The piezoelectric layer further includes an outside piezoelectric portion in the outside region with a bottom surface in the outside region that is an extension of the bottom surface of the piezoelectric layer, and the outside piezoelectric portion includes an angled sidewall that resides in the outside region and extends from the top surface of the piezoelectric layer to the bottom surface of the outside piezoelectric portion in the outside region.
Public/Granted literature
- US20170170801A1 BULK ACOUSTIC WAVE RESONATOR WITH A MODIFIED OUTSIDE STACK PORTION Public/Granted day:2017-06-15
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