Invention Grant
- Patent Title: Pressure sensor assembly mounted to a ceramic substrate
-
Application No.: US15790182Application Date: 2017-10-23
-
Publication No.: US10781094B2Publication Date: 2020-09-22
- Inventor: Brian Ward Guilardi
- Applicant: TE CONNECTIVITY CORPORATION
- Applicant Address: US PA Berwyn
- Assignee: TE CONNECTIVITY CORPORATION
- Current Assignee: TE CONNECTIVITY CORPORATION
- Current Assignee Address: US PA Berwyn
- Main IPC: G01L19/04
- IPC: G01L19/04 ; B81B7/00 ; G01L9/00 ; G01L19/00 ; B81C1/00

Abstract:
A pressure sensor assembly includes a sensor die and a ceramic substrate. The sensor die has a first side and a second side that is opposite to the first side. The sensor die includes a silicon chip that has a diaphragm configured to be exposed to a working fluid. The sensor die includes one or more electrical sensing elements mounted on the diaphragm and configured to measure a pressure of the working fluid. The sensor die is mounted to the ceramic substrate via a solder layer that engages the ceramic substrate and the second side of the sensor die.
Public/Granted literature
- US20190119103A1 PRESSURE SENSOR ASSEMBLY Public/Granted day:2019-04-25
Information query