Invention Grant
- Patent Title: Coating source for producing doped carbon layers
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Application No.: US15556379Application Date: 2016-03-15
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Publication No.: US10781102B2Publication Date: 2020-09-22
- Inventor: Peter Polcik , Sabine Woerle , Ulrich Miller
- Applicant: PLANSEE COMPOSITE MATERIALS GMBH
- Applicant Address: DE Lechbruck am See
- Assignee: Plansee Composite Materials GmbH
- Current Assignee: Plansee Composite Materials GmbH
- Current Assignee Address: DE Lechbruck am See
- Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4244df8
- International Application: PCT/EP2016/000462 WO 20160315
- International Announcement: WO2016/146256 WO 20160922
- Main IPC: C01B32/05
- IPC: C01B32/05 ; C23C14/06 ; C01B32/956 ; C01B32/921 ; B22F3/12 ; B22F7/00 ; C23C14/32 ; C23C14/34 ; H01J37/34 ; H01J37/32 ; C23C14/58
Abstract:
A coating source for physical vapor deposition to produce doped carbon layers. The coating source is produced by way of sintering from pulverulent components and is formed of carbon as matrix material in a proportion of at least 75 mol % and at least one dopant in a proportion in the range from 1 mol % to 25 mol %.
Public/Granted literature
- US20180105421A1 COATING SOURCE FOR PRODUCING DOPED CARBON LAYERS Public/Granted day:2018-04-19
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