Invention Grant
- Patent Title: Film formation device for cutting tool provided with with coating film, and film formation method for cutting tool provided with coating film
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Application No.: US15320860Application Date: 2014-06-26
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Publication No.: US10781514B2Publication Date: 2020-09-22
- Inventor: Masao Kawamura , Toshikatsu Sudo , Atsushi Shinboya
- Applicant: MITSUBISHI MATERIALS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Locke Lord LLP
- Agent James E. Armstrong, IV; Nicholas J. DiCeglie, Jr.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@397613d9
- International Application: PCT/JP2014/067072 WO 20140626
- International Announcement: WO2015/198458 WO 20151230
- Main IPC: C23C14/50
- IPC: C23C14/50 ; C23C14/32 ; B23P15/28 ; C23C14/02 ; C23C14/56 ; C23C14/54

Abstract:
A deposition apparatus for cutting tools with a coating film capable of depositing the coating film in an appropriate temperature condition is provided. The deposition apparatus includes: a deposition chamber in which a coating film is formed on the cutting tools; a pre-treatment chamber and post-treatment chamber, each of which is connected to the deposition chamber through a vacuum valve; and a conveying line that conveys the cutting tools from the pre-treatment chamber to the post-treatment chamber going through the deposition chamber, the in-line deposition apparatus using a conveyed carrier on which rods supporting cutting tools are provided in a standing state along a conveying direction. The deposition chamber includes: a deposition region; a conveying apparatus; a heating region; and a carrier-waiting region.
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