Invention Grant
- Patent Title: Concatenated suspension in a piezoelectric gyroscope
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Application No.: US15988696Application Date: 2018-05-24
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Publication No.: US10782130B2Publication Date: 2020-09-22
- Inventor: Heikki Kuisma
- Applicant: MURATA MANUFACTURING CO., LTD.
- Applicant Address: JP Nagaokakyo-Shi, Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-Shi, Kyoto
- Agency: Squire Patton Boggs (US) LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7967f763 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7347d986 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7b245b46
- Main IPC: G01C19/5747
- IPC: G01C19/5747 ; G01C19/5642 ; G01C19/5712 ; G01C19/5769

Abstract:
The disclosure describes a microelectromechanical gyroscope comprising a substrate and at least one inertial mass suspended from an anchor points by a suspension structure configured to allow the first inertial mass to oscillate rotationally both in the device plane and out of the device plane. The suspension structure comprises a set of first suspenders coated with piezoelectric transducer structures configured drive or detect the oscillating motion of the suspended inertial mass in the device plane, and a set of second suspenders coated with piezoelectric transducer structures configured to drive or detect the oscillating motion of the suspended inertial mass out of the device plane. The set of first suspenders and set of second suspenders are concatenated in the suspension structure.
Public/Granted literature
- US20180340776A1 CONCATENATED SUSPENSION IN A PIEZOELECTRIC GYROSCOPE Public/Granted day:2018-11-29
Information query
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