Invention Grant
- Patent Title: Semiconductor device handler with a floating clamp
-
Application No.: US16371201Application Date: 2019-04-01
-
Publication No.: US10782341B2Publication Date: 2020-09-22
- Inventor: Mhark Lester Lauron Ponghon
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Rose Alyssa Keagy; Charles A. Brill; Frank D. Cimino
- Main IPC: G01R31/28
- IPC: G01R31/28 ; H01L21/687

Abstract:
A chuck apparatus includes a nozzle with a first end configured to engage a device under test (DUT), and a clamp extending around a portion of the nozzle proximate the first end. The clamp includes a recess to receive the DUT, and an engagement surface in the recess to engage the DUT. The chuck apparatus also includes a spring that biases a surface of the clamp toward the first end of the nozzle. A method includes translating a chuck to engage a nozzle with a DUT, further translating the chuck to engage and self-align an engagement surface of a spring mounted clamp with the DUT, further translating the chuck to seat the DUT in the spring mounted clamp, translating the chuck with the DUT to a contactor and translating the chuck with the DUT to engage conductive features of the DUT with conductive probes of the contactor.
Public/Granted literature
- US20200064399A1 SEMICONDUCTOR DEVICE HANDLER WITH A FLOATING CLAMP Public/Granted day:2020-02-27
Information query