Invention Grant
- Patent Title: Substrate treating apparatus
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Application No.: US16353033Application Date: 2019-03-14
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Publication No.: US10784125B2Publication Date: 2020-09-22
- Inventor: Yukihiko Inagaki
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@69d0fc0e
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G03F7/30 ; G03F7/16

Abstract:
Disclosed is a substrate treating apparatus including a first liquid treatment chamber that performs a liquid treatment to a substrate, a second liquid treatment chamber that is disposed below the first liquid treatment chamber and performs a liquid treatment to a substrate, a first feed channel that supplies gases to the first liquid treatment chamber, and a second feed channel that supplies gases to the second liquid treatment chamber. The first feed channel includes a first vertical member that extends substantially vertically. The second feed channel includes a second vertical member that extends substantially vertically. The first vertical member and the second vertical member both extend to a position lower in level than the second liquid treatment chamber.
Public/Granted literature
- US20190295863A1 SUBSTRATE TREATING APPARATUS Public/Granted day:2019-09-26
Information query
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