Invention Grant
- Patent Title: Proton radiation as a tool for selective degradation and physics based device model test and calibration
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Application No.: US15961072Application Date: 2018-04-24
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Publication No.: US10784173B2Publication Date: 2020-09-22
- Inventor: Eric Heller
- Applicant: Government of the United States as Represented by the Secretary of the Air Force
- Applicant Address: US OH Wright-Patterson AFB
- Assignee: United States of America as represented by the Secretary of the Air Force
- Current Assignee: United States of America as represented by the Secretary of the Air Force
- Current Assignee Address: US OH Wright-Patterson AFB
- Agency: AFMCLO/JAZ
- Agent Chastity D. S. Whitaker
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L21/66 ; H01L29/778 ; H01L21/263 ; H01L23/552 ; H01L29/40 ; H01L29/20
Abstract:
A method of evaluating localized degradation of a III-V compound semiconductor. The method includes preparing first and second III-V compound semiconductors. The second III-V compound semiconductor that is similar to the first III-V compound semiconductor and further comprises a shield layer that is configured to alter exposed portions of channels of the second III-V compound semiconductor. The first and second III-V compound semiconductors and irradiated and then electrically tested. Results of the electrical testing of the first and second III-V compound semiconductors are compared.
Public/Granted literature
- US20180308771A1 PROTON RADIATION AS A TOOL FOR SELECTIVE DEGRADATION AND PHYSICS BASED DEVICE MODEL TEST AND CALIBRATION Public/Granted day:2018-10-25
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