Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
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Application No.: US16357343Application Date: 2019-03-19
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Publication No.: US10784259B2Publication Date: 2020-09-22
- Inventor: Hung-Kwei Liao , Chen-Chiang Liu , Kuo-Sheng Shih , Yung-Yao Shih , Ming-Tsung Hsu
- Applicant: Powerchip Semiconductor Manufacturing Corporation
- Applicant Address: TW Hsinchu
- Assignee: Powerchip Semiconductor Manufacturing Corporation
- Current Assignee: Powerchip Semiconductor Manufacturing Corporation
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@64616b4f
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/265 ; H01L21/28 ; H01L21/311 ; H01L21/321 ; H01L21/8238 ; H01L27/092 ; H01L29/40 ; H01L29/49 ; H01L21/3215 ; H01L21/027

Abstract:
Provided is a semiconductor device including a substrate, an isolation structure, a barrier structure, a first conductive layer, a second conductive layer, a first gate dielectric layer, and a second gate dielectric layer. The substrate has a first region and a second region. The barrier structure is located on the isolation structure. The first conductive layer is located on the first region. The second conductive layer is located on the second region. The first gate dielectric layer is located between the first conductive layer and the substrate in the first region. The second gate dielectric layer is located between the second conductive layer and the substrate in the second region. The first gate dielectric layer and the second gate dielectric layer are separated by the isolation structure. A method of manufacturing the semiconductor device is also provided.
Public/Granted literature
- US20200219876A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2020-07-09
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