Invention Grant
- Patent Title: Integration of a memory transistor into High-k, metal gate CMOS process flow
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Application No.: US15862272Application Date: 2018-01-04
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Publication No.: US10784277B2Publication Date: 2020-09-22
- Inventor: Krishnaswamy Ramkumar
- Applicant: LONGITUDE FLASH MEMORY SOLUTIONS LTD.
- Applicant Address: IE Dublin
- Assignee: LONGITUDE FLASH MEMORY SOLUTIONS LTD.
- Current Assignee: LONGITUDE FLASH MEMORY SOLUTIONS LTD.
- Current Assignee Address: IE Dublin
- Agency: Kunzler Bean & Adamson
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L29/49 ; H01L27/1157 ; H01L21/28 ; H01L27/11568 ; H01L27/11573 ; H01L29/66 ; H01L21/265 ; H01L27/092 ; H01L29/792

Abstract:
A memory device that includes a non-volatile memory (NVM) transistor disposed in a first region of a substrate. The NVM transistor includes a first gate including a first type of conductor material. The memory device further includes a first type of low voltage field-effect transistor (LV FET) and an input/out field-effect transistor (I/O FET) disposed in a second region of the substrate. The LV FET includes a second gate comprising a second type of conductor material, the I/O FET includes a third gate comprising a second type of conductor material, and the first and second conductor materials are different. Other embodiments are also described.
Public/Granted literature
- US20180166452A1 INTEGRATION OF A MEMORY TRANSISTOR INTO HIGH-K, METAL GATE CMOS PROCESS FLOW Public/Granted day:2018-06-14
Information query
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