Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16293692Application Date: 2019-03-06
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Publication No.: US10784280B2Publication Date: 2020-09-22
- Inventor: Hiroyuki Ohtori , Satoshi Seto , Takashi Fukushima
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@8ef8ae2
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L21/44 ; H01L27/11582 ; H01L23/522 ; H01L27/1157 ; H01L27/11565

Abstract:
According to one embodiment, a semiconductor memory device includes the following structure. First conductive layers are stacked in first direction and extends in second and third directions. The first conductive layers each includes a pair of first portions, and second and third portions. The first portions extend in second direction, is provided separately from each other in third direction and includes a metal. The second portion is provided between the first portions and includes silicon. The third portion is provided on at least one side of the second portion in second direction, extends in third direction, electrically connects the first portions and includes a metal. Memory pillars extend through the second portions in first direction. Contact plugs are respectively provided on the third portion of one of the first conductive layers.
Public/Granted literature
- US20200098783A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-03-26
Information query
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