Invention Grant
- Patent Title: Electromagnetic wave detector and electromagnetic wave detector array
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Application No.: US16305465Application Date: 2017-04-20
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Publication No.: US10784394B2Publication Date: 2020-09-22
- Inventor: Shimpei Ogawa , Daisuke Fujisawa , Masaaki Shimatani , Satoshi Okuda
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI ELECTRIC CORPORATION
- Current Assignee: MITSUBISHI ELECTRIC CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Xsensus LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@30d94849
- International Application: PCT/JP2017/015832 WO 20170420
- International Announcement: WO2018/012076 WO 20180118
- Main IPC: H01L31/113
- IPC: H01L31/113 ; H01L27/14 ; G01J1/42 ; H01L27/144 ; H01L31/0224 ; H01L31/028
Abstract:
An electromagnetic wave detector, which photoelectrically converts and detects an electromagnetic wave incident on a graphene layer, including: a substrate having a front surface and a back surface; a lower insulating layer provided on the front surface of the substrate; a ferroelectric layer and a pair of electrodes provided on the lower insulating layer, the pair of electrodes arranged to face each other with the ferroelectric layer sandwiched therebetween; an upper insulating layer provided on the ferroelectric layer; and a graphene layer arranged on the lower insulating layer and the upper insulating layer to connect the two electrodes. Alternatively, the electromagnetic wave detector includes: a graphene layer provided on the lower insulating layer; and a ferroelectric layer provided on the graphene layer with an upper insulating layer interposed therebetween and a pair of electrodes provided on the graphene layer to face each other with the ferroelectric layer sandwiched therebetween.
Public/Granted literature
- US20200052146A1 ELECTROMAGNETIC WAVE DETECTOR AND ELECTROMAGNETIC WAVE DETECTOR ARRAY Public/Granted day:2020-02-13
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