Invention Grant
- Patent Title: Microelectronic modules with sinter-bonded heat dissipation structures and methods for the fabrication thereof
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Application No.: US16135189Application Date: 2018-09-19
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Publication No.: US10785862B2Publication Date: 2020-09-22
- Inventor: Lakshminarayan Viswanathan , Elie A. Maalouf , Geoffrey Tucker
- Applicant: NXP USA, INC.
- Applicant Address: US TX Austin
- Assignee: NXP USA, Inc.
- Current Assignee: NXP USA, Inc.
- Current Assignee Address: US TX Austin
- Main IPC: H05K1/02
- IPC: H05K1/02 ; H05K1/18 ; H05K3/32 ; H05K7/20 ; H01L23/15 ; H01L23/373 ; H01L23/427

Abstract:
Methods for producing high thermal performance microelectronic modules containing sinter-bonded heat dissipation structures. In one embodiment, the method includes embedding a sinter-bonded heat dissipation structure in a module substrate. The step of embedding may entail applying a sinter precursor material containing metal particles into a cavity provided in the module substrate, and subsequently sintering the sinter precursor material at a maximum processing temperature less than a melt point of the metal particles to produce a sintered metal body bonded to the module substrate. A microelectronic device and a heatsink are then attached to the module substrate before, after, or concurrent with sintering such that the heatsink is thermally coupled to the microelectronic device through the sinter-bonded heat dissipation structure. In certain embodiments, the microelectronic device may be bonded to the module substrate at a location overlying the thermally-conductive structure.
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