Invention Grant
- Patent Title: Contact structures
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Application No.: US16105102Application Date: 2018-08-20
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Publication No.: US10790376B2Publication Date: 2020-09-29
- Inventor: Ruilong Xie , Chanro Park , Julien Frougier , Kangguo Cheng , Andre P. Labonte
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/66 ; H01L29/417 ; H01L21/8234 ; H01L29/45 ; H01L21/768 ; H01L27/088 ; H01L21/027 ; H01L21/311 ; H01L21/02 ; H01L21/265 ; H01L21/285 ; H01L29/423 ; H01L29/51 ; H01L29/49 ; H01L21/3105 ; H01L21/3213

Abstract:
The present disclosure generally relates to semiconductor structures and, more particularly, to contact structures and methods of manufacture. The structure includes: a plurality of gate structures comprising source and drain regions and sidewall spacers; contacts connecting to at least one gate structure of the plurality of gate structures; and at least one metallization feature connecting to the source and drain regions and extending over the sidewall spacers.
Public/Granted literature
- US20200058757A1 CONTACT STRUCTURES Public/Granted day:2020-02-20
Information query
IPC分类: