Invention Grant
- Patent Title: Method for protecting a MEMS unit against infrared investigations and MEMS unit
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Application No.: US15937352Application Date: 2018-03-27
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Publication No.: US10793425B2Publication Date: 2020-10-06
- Inventor: Michael Curcic , Oliver Willers , Sven Zinober , Ulrich Kunz
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7f5b74dd
- Main IPC: A63B1/00
- IPC: A63B1/00 ; B81B7/02 ; B81C1/00 ; G02B26/08 ; G02B5/22 ; B81B7/00 ; G02B5/02 ; G02B5/20
Abstract:
A method for protecting a MEMS unit, in particular a MEMS sensor, against infrared investigations, at least one area of the MEMS unit being doped, the at least one doped area absorbing, reflecting or diffusely scattering more than 50%, in particular more than 90%, of an infrared light incident upon it.
Public/Granted literature
- US20180297837A1 METHOD FOR PROTECTING A MEMS UNIT AGAINST INFRARED INVESTIGATIONS AND MEMS UNIT Public/Granted day:2018-10-18
Information query
