Invention Grant
- Patent Title: Method for forming sealing film, and sealing film
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Application No.: US15510845Application Date: 2015-10-29
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Publication No.: US10793952B2Publication Date: 2020-10-06
- Inventor: Masamichi Yamashita , Takayoshi Fujimoto , Masaki Mori
- Applicant: TORAY ENGINEERING CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TORAY ENGINEERING CO., LTD.
- Current Assignee: TORAY ENGINEERING CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Global IP Counselors, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@e23c67d
- International Application: PCT/JP2015/080475 WO 20151029
- International Announcement: WO2016/076119 WO 20160519
- Main IPC: C23C16/50
- IPC: C23C16/50 ; H01L31/048 ; B32B7/02 ; C23C16/455 ; H01L31/0392 ; C23C16/02 ; C23C16/54

Abstract:
A method for forming a sealing film, in which a buffer layer and a barrier layer whose density is higher than that of the buffer layer are alternately formed on a substrate, includes forming a first buffer layer on a surface of the substrate, forming a first barrier layer on a surface of the first buffer layer, and forming a second buffer layer on a surface of the first barrier layer. A ratio of a thickness of a portion of the first buffer layer in a thickness direction of the substrate relative to a thickness of a portion of the first buffer layer in an inclined direction that is inclined with respect to the thickness direction is closer to 1 than a ratio of a thickness of a portion of the second buffer layer in the thickness direction relative to a thickness of a portion of the second buffer layer in the inclined direction.
Public/Granted literature
- US20170283951A1 METHOD FOR FORMING SEALING FILM, AND SEALING FILM Public/Granted day:2017-10-05
Information query
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