Invention Grant
- Patent Title: Light-directed electrochemical patterning of copper structures
-
Application No.: US16327732Application Date: 2017-08-29
-
Publication No.: US10793965B2Publication Date: 2020-10-06
- Inventor: Robert H. Coridan , James M. Lowe
- Applicant: BOARD OF TRUSTEES OF THE UNIVERSITY OF ARKANSAS
- Applicant Address: US AR Fayetteville
- Assignee: Board Of Trustees Of The University Of Arkansas
- Current Assignee: Board Of Trustees Of The University Of Arkansas
- Current Assignee Address: US AR Fayetteville
- Agency: Keith A. Vogt, Ltd
- Agent Keith A. Vogt
- International Application: PCT/US2017/049187 WO 20170829
- International Announcement: WO2018/044930 WO 20180308
- Main IPC: C25D9/08
- IPC: C25D9/08 ; H01L31/0224 ; C25D9/00 ; C25D5/48 ; C25D7/12 ; H01L21/288 ; H01L21/321 ; H05K3/02
Abstract:
A method creating a patterned film with cuprous oxide and light comprising the steps of electrodepositing copper from a solution onto a substrate; illuminating selected areas of said deposited copper with light having photon energies above the band gap energy of 2.0 eV to create selected illuminated sections and non-illuminated sections; and stripping non-illuminated sections leaving said illuminated sections on the substrate. An additional step may include galvanically replacing the copper with one or more noble metals.
Public/Granted literature
- US20190177867A1 Light-Directed Electrochemical Patterning of Copper Structures Public/Granted day:2019-06-13
Information query
