Invention Grant
- Patent Title: Sample rod growth and resistivity measurement during single crystal silicon ingot production
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Application No.: US16020698Application Date: 2018-06-27
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Publication No.: US10793969B2Publication Date: 2020-10-06
- Inventor: Carissima Marie Hudson , JaeWoo Ryu , Richard J. Phillips , Robert Standley , HyungMin Lee , YoungJung Lee
- Applicant: Global Wafers Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: GlobalWafers Co., Ltd.
- Current Assignee: GlobalWafers Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Armstrong Teasdale LLP
- Main IPC: C30B15/10
- IPC: C30B15/10 ; C30B15/20 ; C30B29/06 ; C30B15/14

Abstract:
Methods for forming single crystal silicon ingots with improved resistivity control. The methods involve growth and resistivity measurement of a sample rod. The sample rod may have a diameter less than the diameter of the product ingot. The resistivity of the sample rod may be measured directly by contacting a resistivity probe with a planar segment formed on the sample rod. The sample rod may be annealed in a thermal donor kill cycle prior to measuring the resistivity.
Public/Granted literature
- US20200002836A1 SAMPLE ROD GROWTH AND RESISTIVITY MEASUREMENT DURING SINGLE CRYSTAL SILICON INGOT PRODUCTION Public/Granted day:2020-01-02
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