Invention Grant
- Patent Title: Method and apparatus for producing bulk silicon carbide using a silicon carbide seed
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Application No.: US14478567Application Date: 2014-09-05
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Publication No.: US10793971B2Publication Date: 2020-10-06
- Inventor: Roman V. Drachev , Andriy M. Andrukhiv , David S. Lyttle , Parthasarathy Santhanaraghavan
- Applicant: GTAT Corporation
- Applicant Address: US NH Merrimack
- Assignee: GTAT Corporation
- Current Assignee: GTAT Corporation
- Current Assignee Address: US NH Merrimack
- Agency: Behmke Innovation Group LLC
- Agent James M. Behmke; Jonathon P. Western
- Main IPC: C30B23/06
- IPC: C30B23/06 ; C30B29/36 ; C30B23/02 ; C30B23/00

Abstract:
A method of producing silicon carbide is disclosed. The method comprises the steps of providing a sublimation furnace comprising a furnace shell, at least one heating element positioned outside the furnace shell, and a hot zone positioned inside the furnace shell surrounded by insulation. The hot zone comprises a crucible with a silicon carbide precursor positioned in the lower region and a silicon carbide seed positioned in the upper region. The hot zone is heated to sublimate the silicon carbide precursor, forming silicon carbide on the bottom surface of the silicon carbide seed. Also disclosed is the sublimation furnace to produce the silicon carbide as well as the resulting silicon carbide material.
Public/Granted literature
- US20150068446A1 METHOD AND APPARATUS FOR PRODUCING BULK SILICON CARBIDE USING A SILICON CARBIDE SEED Public/Granted day:2015-03-12
Information query
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