Invention Grant
- Patent Title: Additively manufactured gas distribution manifold
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Application No.: US16241811Application Date: 2019-01-07
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Publication No.: US10794519B2Publication Date: 2020-10-06
- Inventor: Christopher William Burkhart , Andrew C. Lee , David J. Hemker
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: F16L25/00
- IPC: F16L25/00 ; H01L21/67 ; B33Y10/00 ; B22F7/04 ; F16L9/00 ; F16L13/00 ; F16L47/14 ; F16L3/00 ; F16L51/02 ; F16L23/14 ; F16L43/00 ; F16L41/02 ; F16K11/00 ; H01J37/32 ; B01F15/04 ; F16K27/00 ; C23C16/455 ; B33Y80/00 ; B22F3/00 ; B22F3/105
Abstract:
Methods and apparatuses for additively manufactured tubular passages, additively manufactured manifolds, and additively manufactured heaters are provided.
Public/Granted literature
- US20190211955A1 ADDITIVELY MANUFACTURED GAS DISTRIBUTION MANIFOLD Public/Granted day:2019-07-11
Information query
