A touch probe for sensing the position of a surface, having a housing and a moving assembly supported within the housing and including a flexible reflective element, a spacer element, and a semitransparent element, wherein a reflective surface of the flexible reflective element and a surface of the semitransparent element are separated by the spacer element, and a stylus connected to the flexible reflective element. Movement of the stylus responsive to a force causes the flexible reflective element to flex and change distances between points on the reflective surface and on the surface of the semitransparent element. Coherent light incident upon the semitransparent element and directed towards the reflective surface creates interference fringes dependent upon separation distances between the reflective surface and the surface of the semitransparent element. A detector senses changes in the interference fringes patterns in response to flexing of the flexible element.