Invention Grant
- Patent Title: Autofocus system and method
-
Application No.: US16212224Application Date: 2018-12-06
-
Publication No.: US10794689B2Publication Date: 2020-10-06
- Inventor: Daniel Gene Smith , Eric Peter Goodwin
- Applicant: Nikon Corporation
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Klarquist Sparkman, LLP
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/25 ; G01B11/06 ; G03F7/20

Abstract:
New and useful concepts for an autofocus system and method are provided. A basic concept uses fringe projection in an autofocus system and method. A further aspect provides spatial filtering concepts for the fringe projection concept. In yet another aspect, the fringe projection autofocus system and method is provided with temporal phase shifting using no moving parts. In a still further aspect, the fringe projection autofocus system and method is provided with unambiguous height measurement concepts.
Public/Granted literature
- US20190107388A1 AUTOFOCUS SYSTEM AND METHOD Public/Granted day:2019-04-11
Information query