- Patent Title: Acoustic wave sensors and methods of sensing a gas-phase analyte
-
Application No.: US16242395Application Date: 2019-01-08
-
Publication No.: US10794866B2Publication Date: 2020-10-06
- Inventor: Christopher Gilmore , Aaron A. Rachford , Hee Jae Yoon , Jaclyn Murphy , Peter Trefonas, III , Deyan Wang
- Applicant: Rohm and Haas Electronic Materials LLC , Rohm and Haas Electronic Materials Korea Ltd.
- Applicant Address: US MA Marlborough KR Seoul
- Assignee: Rohm and Haas Electronic Materials LLC,Rohm and Haas Electronic Materials Korea Ltd.
- Current Assignee: Rohm and Haas Electronic Materials LLC,Rohm and Haas Electronic Materials Korea Ltd.
- Current Assignee Address: US MA Marlborough KR Seoul
- Agent Jonathan D. Baskin
- Main IPC: G01N29/036
- IPC: G01N29/036 ; G01N29/02 ; C08F232/06 ; C08F238/00 ; C08L39/04 ; C08L79/08 ; G01N29/22 ; G01N29/36 ; H01L41/113

Abstract:
Acoustic wave sensors comprise: a piezoelectric layer, first and second electrodes arranged with the piezoelectric layer in a piezoelectric transducer circuit; and a polymeric sensing layer for adsorbing a gas-phase analyte, the adsorption of which analyte causes a change in resonant frequency of the piezoelectric transducer circuit, wherein the polymeric sensing layer comprises: (a) a polymer chosen from substituted or unsubstituted: polyarylenes comprising the reaction product of monomers comprising a first monomer comprising an aromatic acetylene group and a second monomer comprising a cyclopentadienone group; polyamides; polypyrazoles; or novolacs; or a cured product thereof; (b) a polymer chosen from substituted or unsubstituted: polyamic acids; or polyamic acid-polyimide copolymers; (c) a polymer formed from one or more monomers comprising a monomer comprising a polar group-substituted arylcyclobutene group, or a cured product thereof; or (d) a polymer comprising polymerized units of a monomer chosen from substituted or unsubstituted: maleimides; or norbomenes; or a cured product thereof. The acoustic wave sensors and methods of using such sensors find particular applicability in the sensing of gas-phase analytes.
Public/Granted literature
- US20190219543A1 ACOUSTIC WAVE SENSORS AND METHODS OF SENSING A GAS-PHASE ANALYTE Public/Granted day:2019-07-18
Information query