Invention Grant
- Patent Title: AFM with suppressed parasitic signals
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Application No.: US15547489Application Date: 2017-01-26
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Publication No.: US10794930B2Publication Date: 2020-10-06
- Inventor: Ozgur Sahin
- Applicant: Ozgur Sahin
- Agent Steven Stupp
- International Application: PCT/US2017/015192 WO 20170126
- International Announcement: WO2018/140024 WO 20180802
- Main IPC: G01Q10/06
- IPC: G01Q10/06 ; G01Q60/30 ; G01Q70/10 ; G01Q60/38

Abstract:
An AFM that suppress parasitic deflection signals is described. In particular, the AFM may use a cantilever with a probe tip that is offset along a lateral direction from a longitudinal axis of torsion of the cantilever. During AFM measurements, an actuator may vary a distance between the sample and the probe tip along a direction approximately perpendicular to a plane of the sample stage in an intermittent contact mode. Then, a measurement circuit may measure a lateral signal associated with a torsional mode of the cantilever during the AFM measurements. This lateral signal may correspond to a force between the sample and the probe tip. Moreover, a feedback circuit may maintain, relative to a threshold value: the force between the sample and the probe tip; and/or a deflection of the cantilever corresponding to the force. Next, the AFM may determine information about the sample based on the lateral signal.
Public/Granted literature
- US20190094265A1 AFM with Suppressed Parasitic Signals Public/Granted day:2019-03-28
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