Invention Grant
- Patent Title: Scanning probe microscope and cantilever moving method
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Application No.: US16284743Application Date: 2019-02-25
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Publication No.: US10794931B2Publication Date: 2020-10-06
- Inventor: Eiji Iida
- Applicant: Shimadzu Corporation
- Applicant Address: JP Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto-shi, Kyoto
- Assignee: Shimadzu Corporation
- Current Assignee: Shimadzu Corporation
- Current Assignee Address: JP Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto-shi, Kyoto
- Agency: Muir Patent Law, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@79a2f05f
- Main IPC: G01Q20/02
- IPC: G01Q20/02 ; G01Q30/14 ; G01Q10/04 ; G01Q20/04

Abstract:
When a liquid surface is detected based on a detection signal from a photodetector during the approaching operation, a photodetector movement processor moves the photodetector to a position where reflected light from a cantilever is incident with the cantilever being in liquid. When the reflected light from the cantilever is incident on the photodetector during the approaching operation continued after the movement of the photodetector by the photodetector movement processor, an optical axis adjustment processor adjusts an optical axis of the reflected light incident on the photodetector. When a surface of a solid sample is detected based on a detection signal from the photodetector during the approaching operation continued after the adjustment of the optical axis by the optical axis adjustment processor, an approaching processor stops the approaching operation.
Public/Granted literature
- US20190317124A1 SCANNING PROBE MICROSCOPE AND CANTILEVER MOVING METHOD Public/Granted day:2019-10-17
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