Invention Grant
- Patent Title: Micromirror device having a mechanical stop
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Application No.: US15986973Application Date: 2018-05-23
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Publication No.: US10795149B2Publication Date: 2020-10-06
- Inventor: Helmut Grutzeck , Peter Sudy , Andreas Finn , Daniel Maier
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7962666d
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B3/00 ; G02B27/00

Abstract:
A micromirror device having a cap, a function layer, and a window layer, which are disposed on top of one another and parallel to a main extension plane, the function layer being situated between the cap and the window layer, and a micromirror is patterned out of the function layer. The micromirror device has a stop, which is designed to restrict a deflection of the micromirror in a direction perpendicular to the main extension plane.
Public/Granted literature
- US20180341102A1 MICROMIRROR DEVICE HAVING A MECHANICAL STOP Public/Granted day:2018-11-29
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