Invention Grant
- Patent Title: Method for forming a functionalised guide pattern for a graphoepitaxy method
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Application No.: US16304933Application Date: 2017-05-23
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Publication No.: US10795257B2Publication Date: 2020-10-06
- Inventor: Raluca Tiron , Nicolas Posseme , Xavier Chevalier
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7dab8f2d
- International Application: PCT/EP2017/062455 WO 20170523
- International Announcement: WO2017/202860 WO 20171130
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004 ; G03F7/075 ; G03F7/11 ; H01L21/311 ; H01L21/033 ; B81C1/00 ; H01L21/3115

Abstract:
A method for forming a functionalised guide pattern for the self-assembly of a block copolymer by graphoepitaxy, includes forming a guide pattern made of a first material having a first chemical affinity for the block copolymer, the guide pattern having a cavity with a bottom and side walls; grafting a functionalisation layer made of a second polymeric material having a second chemical affinity for the block copolymer, the functionalisation layer having a first portion grafted onto the bottom of the cavity and a second portion grafted onto the side walls of the cavity; selectively etching the second portion of the functionalisation layer relative to the first portion of the functionalisation layer, the etching including a step of exposure to an ion beam following a direction that intersects the second portion of the functionalisation layer, such that the ion beam does not reach the first portion of the functionalisation layer.
Public/Granted literature
- US20190278171A1 METHOD FOR FORMING A FUNCTIONALISED GUIDE PATTERN FOR A GRAPHOEPITAXY METHOD Public/Granted day:2019-09-12
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