Invention Grant
- Patent Title: Additive for resist underlayer film-forming composition and resist underlayer film-forming composition containing the same
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Application No.: US15774321Application Date: 2016-11-08
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Publication No.: US10795261B2Publication Date: 2020-10-06
- Inventor: Tokio Nishita , Rikimaru Sakamoto
- Applicant: NISSAN CHEMICAL INDUSTRIES, LTD.
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@377adf09
- International Application: PCT/JP2016/083116 WO 20161108
- International Announcement: WO2017/086213 WO 20170526
- Main IPC: G03F7/11
- IPC: G03F7/11 ; C08F220/36 ; G03F7/38 ; G03F7/16 ; G03F7/20 ; G03F7/32

Abstract:
An additive for a resist underlayer film-forming composition, including a copolymer having structural units of the following Formulae (1) to (3): wherein R1s are each independently a hydrogen atom or a methyl group, R2 is a C1-3 alkylene group, A is a protecting group, R3 is an organic group having 4 to 7-membered ring lactone skeleton, adamantane skeleton, tricyclodecane skeleton, or norbornane skeleton, and R4 is a linear, branched, or cyclic organic group having a carbon atom number of 1 to 12, wherein at least one hydrogen atom is substituted with a fluoro group and that optionally has at least one hydroxy group as a substituent. A resist underlayer film-forming composition for lithography including additive, a resin that is different from copolymer, organic acid, crosslinker, and solvent, wherein the copolymer's content is 3 parts by mass to 40 parts by mass relative to 100 parts by mass of the resin.
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