Invention Grant
- Patent Title: Detection device, microwave output device and plasma processing apparatus
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Application No.: US16523066Application Date: 2019-07-26
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Publication No.: US10796886B2Publication Date: 2020-10-06
- Inventor: Kazushi Kaneko , Yohei Ishida
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@16fc5a7a
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01P5/18 ; H01P3/06 ; H01P3/10 ; H01P3/16 ; H01P3/12 ; H01P5/12

Abstract:
A detection device includes a substrate on which a connector connected to a transmission line for microwaves, a detection circuit configured to convert the microwaves inputted from the transmission line via the connector to a detection value indicating power of the microwaves, and an output port configured to output the detection value obtained by the detection circuit are disposed. The detection device further includes a housing that has a first opening and a second opening and accommodates the substrate in a state where the connector is inserted into the first opening and the output port is inserted into the second opening. The detection device further includes a first sealing member provided at the first opening of the housing to seal a periphery of the connector; and a second sealing member provided at the second opening of the housing to seal a periphery of the output port.
Public/Granted literature
- US20200035462A1 DETECTION DEVICE, MICROWAVE OUTPUT DEVICE AND PLASMA PROCESSING APPARATUS Public/Granted day:2020-01-30
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