Invention Grant
- Patent Title: Ion assisted deposition for rare-earth oxide based thin film coatings on process rings
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Application No.: US15640287Application Date: 2017-06-30
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Publication No.: US10796888B2Publication Date: 2020-10-06
- Inventor: Jennifer Y. Sun , Biraja P. Kanungo , Vahid Firouzdor , Ying Zhang
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C14/00 ; C23C14/08
Abstract:
A ring shaped body includes a top flat region, a ring inner side and a ring outer side. The ring inner side comprises an approximately vertical wall. A conformal protective layer is disposed on at least the top flat region, the ring inner side and the ring outer side of the ring shaped body. The protective layer has a first thickness of less than 300 μm on the top flat region and a second thickness on the vertical wall of the ring inner side, where the second thickness is 45-70% of the first thickness.
Public/Granted literature
- US20170301522A1 ION ASSISTED DEPOSITION FOR RARE-EARTH OXIDE BASED THIN FILM COATINGS ON PROCESS RINGS Public/Granted day:2017-10-19
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