Invention Grant
- Patent Title: Die tray with channels
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Application No.: US15806822Application Date: 2017-11-08
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Publication No.: US10796936B2Publication Date: 2020-10-06
- Inventor: Cyprian Emeka Uzoh
- Applicant: Invensas Bonding Technologies, Inc.
- Applicant Address: US CA San Jose
- Assignee: Invensas Bonding Technologies, Inc.
- Current Assignee: Invensas Bonding Technologies, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/673 ; H01L21/02 ; H01L23/00 ; H01L25/065 ; H01L25/00

Abstract:
Representative implementations of devices and techniques provide a device and a technique for processing integrated circuit (IC) dies. The device comprises a die tray (such as a pick and place tray, for example) for holding the dies during processing. The die tray may include an array of pockets sized to hold individual dies. The technique can include loading dies on the die tray, cleaning the top and bottom surfaces of the dies, and ashing and activating both surfaces of the dies while on the die tray, eliminating the need to turn the dies over during processing.
Public/Granted literature
- US20180182654A1 Die tray with channels Public/Granted day:2018-06-28
Information query
IPC分类: