Invention Grant
- Patent Title: Mounting member
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Application No.: US16069923Application Date: 2017-01-10
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Publication No.: US10796941B2Publication Date: 2020-10-06
- Inventor: Shotaro Masuda , Tomoaki Ichikawa , Yohei Maeno
- Applicant: NITTO DENKO CORPORATION
- Applicant Address: JP Ibaraki-shi, Osaka
- Assignee: NITTO DENKO CORPORATION
- Current Assignee: NITTO DENKO CORPORATION
- Current Assignee Address: JP Ibaraki-shi, Osaka
- Agency: Sughrue Mion, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3ecbeff
- International Application: PCT/JP2017/000437 WO 20170110
- International Announcement: WO2017/122619 WO 20170720
- Main IPC: C01B32/158
- IPC: C01B32/158 ; H01L21/687 ; B82Y30/00 ; H01L21/677 ; H01L21/683 ; C01B32/152 ; C01B32/16

Abstract:
Provided is a mounting member that is excellent in low dusting property and hardly contaminates an object to be mounted while being excellent in gripping force and heat resistance. In one embodiment of the present invention, the mounting member includes an aggregate of carbon nanotubes for forming amounting surface, wherein a standard deviation of diameters of the carbon nanotubes is 3 nm or less. In one embodiment of the present invention, the mounting member includes an aggregate of carbon nanotubes for forming a mounting surface, wherein the aggregate of the carbon nanotubes includes carbon nanotubes each having a multi-walled structure, and wherein a standard deviation of wall numbers of the carbon nanotubes is 3 or less.
Public/Granted literature
- US20190035672A1 MOUNTING MEMBER Public/Granted day:2019-01-31
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