Invention Grant
- Patent Title: Method and device for surface treatment of substrates
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Application No.: US16581851Application Date: 2019-09-25
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Publication No.: US10796944B2Publication Date: 2020-10-06
- Inventor: Markus Wimplinger
- Applicant: EV Group E. Thallner GmbH
- Applicant Address: AT St. Florian am Inn
- Assignee: EV Group E. Thallner GmbH
- Current Assignee: EV Group E. Thallner GmbH
- Current Assignee Address: AT St. Florian am Inn
- Agency: Kusner & Jaffe
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/762 ; C23C14/48
Abstract:
A method for surface treatment of an at least primarily crystalline substrate surface of a substrate such that by amorphization of the substrate surface, an amorphous layer is formed at the substrate surface with a thickness d>0 nm of the amorphous layer. This invention also relates to a corresponding device for surface treatment of substrates.
Public/Granted literature
- US20200020572A1 METHOD AND DEVICE FOR SURFACE TREATMENT OF SUBSTRATES Public/Granted day:2020-01-16
Information query
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