Invention Grant
- Patent Title: Nano sensing chip including sensing materials operating through device-localized joule heating
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Application No.: US16052484Application Date: 2018-08-01
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Publication No.: US10796965B2Publication Date: 2020-10-06
- Inventor: Ru-Zheng Lin , Jeng-Tzong Sheu
- Applicant: NATIONAL CHIAO TUNG UNIVERSITY
- Applicant Address: TW Hsinchu
- Assignee: NATIONAL CHIAO TUNG UNIVERSITY
- Current Assignee: NATIONAL CHIAO TUNG UNIVERSITY
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@dd48e1a
- Main IPC: G01N33/00
- IPC: G01N33/00 ; H01L21/8234 ; H01L21/285 ; H01L29/66 ; H01L29/786 ; G01N27/00 ; H01L27/12

Abstract:
A method for forming a nanodevice sensing chip includes forming nanodevices having a sensing region capable of producing localized Joule heating. Individual nanodevice is electrical-biased in a chemical vapor deposition (CVD) system or an atomic layer deposition (ALD) system enabling the sensing region of the nanodevice produce localized Joule heating and depositing sensing material only on this sensing region. A sensing chip is formed via nanodevices with sensing region of each nanodevice deposited various materials separately. The sensing chip is also functioned under device Joule self-heating to interact and detect the specific molecules.
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