Invention Grant
- Patent Title: Semiconductor structure, package structure, and manufacturing method thereof
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Application No.: US16134971Application Date: 2018-09-19
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Publication No.: US10796990B2Publication Date: 2020-10-06
- Inventor: Wei-Ting Chen , Chung-Hao Tsai , Chen-Hua Yu , Chuei-Tang Wang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/522 ; H01L23/48 ; H01L25/16 ; H01L23/00 ; H01L21/56

Abstract:
A semiconductor structure including at least one integrated circuit component is provided. The at least one integrated circuit component includes a first semiconductor substrate and a second semiconductor substrate electrically coupled to the first semiconductor substrate, wherein the first semiconductor substrate and the second semiconductor substrate are bonded through a first hybrid bonding interface, and at least one of the first semiconductor substrate or the second semiconductor substrate includes at least one first embedded capacitor.
Public/Granted literature
- US20200091063A1 SEMICONDUCTOR STRUCTURE, PACKAGE STRUCTURE, AND MANUFACTURING METHOD THEREOF Public/Granted day:2020-03-19
Information query
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