Invention Grant
- Patent Title: Resistor structure for integrated circuit, and related methods
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Application No.: US16369788Application Date: 2019-03-29
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Publication No.: US10797046B1Publication Date: 2020-10-06
- Inventor: Jiehui Shu , Hui Zang
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: H01L27/07
- IPC: H01L27/07 ; H01L49/02 ; H01L29/78 ; H01L23/522 ; H01L21/768 ; H01L21/762 ; H01L27/088 ; H01L27/02 ; H01L27/06

Abstract:
Embodiments of the disclosure provide a resistor structure for an integrated circuit (IC) and related methods. The resistor structure may include: a shallow trench isolation (STI) region on a substrate; a resistive material above a portion of the shallow trench isolation (STI) region; a gate structure on another portion of the STI region, above the substrate, and horizontally displaced from the resistive material; an insulative barrier above the STI region and contacting an upper surface and sidewalls of the resistive material, an upper surface of the insulative barrier being substantially coplanar with an upper surface of the gate structure; and a pair of contacts within the insulative barrier, and each positioned on an upper surface of the resistive material.
Public/Granted literature
- US20200312947A1 RESISTOR STRUCTURE FOR INTEGRATED CIRCUIT, AND RELATED METHODS Public/Granted day:2020-10-01
Information query
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