Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16118356Application Date: 2018-08-30
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Publication No.: US10797069B2Publication Date: 2020-10-06
- Inventor: Masaki Kondo
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@22cbd7dd
- Main IPC: G11C16/04
- IPC: G11C16/04 ; H01L27/11582 ; H01L27/11565 ; H01L27/1157 ; H01L21/768 ; G11C16/10 ; H01L29/51 ; H01L21/28

Abstract:
A semiconductor memory device includes a semiconductor substrate, a pillar disposed above the semiconductor substrate and extending in a first direction crossing a principal surface of the semiconductor substrate, a plurality of first memory cells arranged on a first side surface of the pillar along the first direction, and a plurality of second memory cells arranged on a second side surface of the pillar along the first direction. The memory device further includes a plurality of first control gate layers respectively connected to the first memory cells, a plurality of second control gate layers respectively connected to the second memory cells, and a stacked film disposed between one of the first control gate layers and one of the second control gate layers, the stacked film including a first insulating layer, a second insulating layer, and an electron capture layer disposed between the first insulating layer and the second insulating layer.
Public/Granted literature
- US20190287993A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2019-09-19
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