Invention Grant
- Patent Title: Vertical-transport field-effect transistors with self-aligned contacts
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Application No.: US15947991Application Date: 2018-04-09
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Publication No.: US10797138B2Publication Date: 2020-10-06
- Inventor: Emilie Bourjot , Daniel Chanemougame , Steven Bentley
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L29/417 ; H01L29/66 ; H01L29/78

Abstract:
Methods of forming contacts for vertical-transport field-effect transistors and structures for a vertical-transport field-effect transistor and contact. An interlayer dielectric layer is deposited over a gate stack, and a first opening is formed in the interlayer dielectric layer and penetrates through the gate stack to cut the gate stack into a first section and a second section. A dielectric pillar is formed in the first opening and is arranged between the first section of the gate stack and the second section of the gate stack. Second and third openings are formed in the interlayer dielectric layer that penetrate to the gate stack and that are divided by the dielectric pillar. A first contact in the second opening is coupled with the first section of the gate stack, and a second contact in the third opening is coupled with the second section of the gate stack.
Public/Granted literature
- US20190312116A1 VERTICAL-TRANSPORT FIELD-EFFECT TRANSISTORS WITH SELF-ALIGNED CONTACTS Public/Granted day:2019-10-10
Information query
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