Invention Grant
- Patent Title: Laterally diffused mosfet with locos dot
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Application No.: US16012358Application Date: 2018-06-19
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Publication No.: US10797171B2Publication Date: 2020-10-06
- Inventor: Guowei Zhang
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/423 ; H01L27/092 ; H01L29/40 ; H01L29/66

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to a laterally diffused MOSFET (LDMOS) and methods of manufacture. The structure includes: a gate structure having a drain region and a source region; and an oxidation extending from the gate structure to the drain region of the gate structure, the oxidation comprising a thinner oxide portion and a thicker oxide portion.
Public/Granted literature
- US20190386138A1 LATERALLY DIFFUSED MOSFET WITH LOCOS DOT Public/Granted day:2019-12-19
Information query
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