Invention Grant
- Patent Title: Method for producing an optoelectronic device comprising a step of etching the rear face of the growth substrate
-
Application No.: US16473665Application Date: 2017-12-22
-
Publication No.: US10797200B2Publication Date: 2020-10-06
- Inventor: Eric Pourquier
- Applicant: ALEDIA
- Applicant Address: FR Grenoble
- Assignee: ALEDIA
- Current Assignee: ALEDIA
- Current Assignee Address: FR Grenoble
- Agency: Occhiuti & Rohlicek LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2699c4e4
- International Application: PCT/FR2017/053817 WO 20171222
- International Announcement: WO2018/122517 WO 20180705
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L33/24

Abstract:
The invention relates to a method for manufacturing an optoelectronic device (1), comprising the following steps: a) providing a growth substrate (10) made from a semiconductor material; b) forming a plurality of diodes (20) each comprising a lower face (20i); c) removing at least a portion (12; 13) of the substrate so as to free the lower face (20i); wherein: step a) involves producing a lower part and an upper part of the substrate, the upper part (12) having a uniform thickness (eref) and a level of doping less than that of the lower part; step c) involving removal of the lower part (11) by selective chemical etching with respect to the upper part (12).
Information query
IPC分类: