• Patent Title: Method for producing an optoelectronic device comprising a step of etching the rear face of the growth substrate
  • Application No.: US16473665
    Application Date: 2017-12-22
  • Publication No.: US10797200B2
    Publication Date: 2020-10-06
  • Inventor: Eric Pourquier
  • Applicant: ALEDIA
  • Applicant Address: FR Grenoble
  • Assignee: ALEDIA
  • Current Assignee: ALEDIA
  • Current Assignee Address: FR Grenoble
  • Agency: Occhiuti & Rohlicek LLP
  • Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2699c4e4
  • International Application: PCT/FR2017/053817 WO 20171222
  • International Announcement: WO2018/122517 WO 20180705
  • Main IPC: H01L33/00
  • IPC: H01L33/00 H01L33/24
Method for producing an optoelectronic device comprising a step of etching the rear face of the growth substrate
Abstract:
The invention relates to a method for manufacturing an optoelectronic device (1), comprising the following steps: a) providing a growth substrate (10) made from a semiconductor material; b) forming a plurality of diodes (20) each comprising a lower face (20i); c) removing at least a portion (12; 13) of the substrate so as to free the lower face (20i); wherein: step a) involves producing a lower part and an upper part of the substrate, the upper part (12) having a uniform thickness (eref) and a level of doping less than that of the lower part; step c) involving removal of the lower part (11) by selective chemical etching with respect to the upper part (12).
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