Invention Grant
- Patent Title: Integrated circuits with magnetic random access memory (MRAM) devices and methods for fabricating such devices
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Application No.: US15882362Application Date: 2018-01-29
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Publication No.: US10797223B2Publication Date: 2020-10-06
- Inventor: Bin Liu , Eng Huat Toh , Yinjie Ding , Kangho Lee , Elgin Kiok Boone Quek
- Applicant: Globalfoundries Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Thompson Hine LLP
- Main IPC: H01L43/02
- IPC: H01L43/02 ; G11C11/16 ; H01L27/22 ; H01L29/78 ; H01L43/12

Abstract:
Integrated circuits with magnetic random access memory (MRAM) devices and methods for fabricating such devices are provided. In an exemplary embodiment, a method for fabricating MRAM bitcells includes determining a desired inter-cell spacing between a first bitcell and a second bitcell and double patterning a semiconductor substrate to form semiconductor fin structures, wherein the semiconductor fin structures are formed in groups with an intra-group pitch between grouped semiconductor fin structures and with the inter-cell spacing between adjacent groups of semiconductor fin structures different from the intra-group pitch. The method further includes forming a first MRAM memory structure over the semiconductor fin structures in the first bitcell and forming a second MRAM memory structure over the semiconductor fin structures in the second bitcell. Also, the method includes forming a first source line for the first bitcell between the first MRAM memory structure and the second MRAM memory structure.
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