Invention Grant
- Patent Title: Method of fabricating novel packages for electronic components
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Application No.: US16521674Application Date: 2019-07-25
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Publication No.: US10797681B1Publication Date: 2020-10-06
- Inventor: Dror Hurwitz , BawChing Perng , Duan Feng
- Applicant: Zhuhai Crystal Resonance Technologies Co., Ltd.
- Applicant Address: CN Zhuhai
- Assignee: Zhuhai Crystal Resonance Technologies Co., Ltd.
- Current Assignee: Zhuhai Crystal Resonance Technologies Co., Ltd.
- Current Assignee Address: CN Zhuhai
- Agency: Wiggin and Dana LLP
- Agent Gregory S. Rosenblatt; Thomas M. Landman
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/48 ; H03H9/58 ; H01L21/768 ; H01L23/66

Abstract:
A method of fabricating packaged electronic components with improved yield and at lower unit cost; the method comprising the steps of obtaining an active membrane layer on a carrier substrate, depositing a front electrode onto a front of the active membrane layer, obtaining an inner front section including at least a silicon handle or wafer, attaching an inner front end section to an outer surface of the front electrode, detaching the carrier substrate from a back surface of an active membrane on the opposite surface from the front surface on which the front electrode is deposited, patterning the active membrane layer into an array of at least one island of membrane, selectively removing the front electrode and bonding layer, selectively applying an inner passivation layer, and selectively depositing a back electrode layer on the thus exposed back surface of the active membrane.
Information query
IPC分类: