Invention Grant
- Patent Title: Algorithm selector based on image frames
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Application No.: US16389442Application Date: 2019-04-19
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Publication No.: US10801968B2Publication Date: 2020-10-13
- Inventor: Bjorn Brauer
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N21/95 ; G01N21/956

Abstract:
Based on job dumps for defects of interest and nuisance events for multiple optical modes, detection algorithms, and attributes, the best combination of the aforementioned is identified. Combinations of each of the modes with each of the detection algorithms can be compared for all the defects of interest detected at an offset of zero. Capture rate versus nuisance rate can be determined for one of the attributes in each of the combinations.
Public/Granted literature
- US20200132610A1 ALGORITHM SELECTOR BASED ON IMAGE FRAMES Public/Granted day:2020-04-30
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