Invention Grant
- Patent Title: Sensing capacitor with a permeable electrode
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Application No.: US15173468Application Date: 2016-06-03
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Publication No.: US10801985B2Publication Date: 2020-10-13
- Inventor: Benjamin Stassen Cook , Mehmet Aslan
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Michael A. Davis, Jr.; Charles A. Brill; Frank D. Cimino
- Main IPC: G01N27/22
- IPC: G01N27/22 ; B82Y30/00 ; G01N31/22 ; H01L21/02 ; H01L21/288 ; H01L21/321 ; H01L49/02
Abstract:
An integrated circuit (IC) with an impedance sensor fabricated on a surface of the substrate is disclosed. The impedance sensor includes a bottom conductive plate formed on the substrate. A sensing membrane is formed on the bottom conductive plate. A top conductive plate is formed on the sensing membrane, in which the top conductive plate is a fusion of conductive nanoparticles having a random three dimensional porosity that is permeable to a reagent.
Public/Granted literature
- US20170350846A1 Sensing Capacitor with a Permeable Electrode Public/Granted day:2017-12-07
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